LioniX provides foundry services ranging form single step services as well as processing of complex structures and components. Our foundry services are performed by LioniX engineers on the Nanolab equipment from the MESA+ Research Institute. In addition LioniX has its private cleanroom facilities with equipment for our proprietary technologies.
LioniX microtechnology services are particularly useful for companies developing MST/MEMS-based products, but who fail the access to critical technologies. LioniX MEMS foundry services are not directed to any particular market, however we experience a particular influx from telecom startups, life science and IPC equipment manufacturers and research institutes.
Our processes are performed on silicon, SOI, borosilicate, fused silica and other substrates, preferably on 100 mm wafers but other sizes are possible as well. We work with carefully selected wafer manufacturers who deliver on request single/double side polished, doping levels, roughness, bow/warp etc. Or you ship your own wafers, blank or processed.