Mask design

To design your masks we use various tools such as CleWIN or MaskEngineer for both parametric and symbol based design strategies.

To design a maskset we can start from your functional requirements or you can send us a CAD file or a dimensioned drawing of your chip design. In the latter case we will do wafer-layout and add features like alignment marks and PCF's (process control features). You will always be given the opportunity for a final mask check before we order masks.

Masks are manufactered on our in-house laserbeam mask writer. Masks have submicrometer accuracy, which suffices for most microfluidic and sensor applications. For optical waveguide masks we use an external e-beam facility.