TriPleX Technology
Background
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TriPleX waveguides form a new class of integrated-optic planar lightwave circuits using low-cost, CMOS-compatible technology. The waveguides are based on LPCVD processing of alternating Si3N4 and SiO2 layers. This technology allows for medium and high index-contrast waveguides that exhibit low channel attenuation. In addition, TriPleX waveguides are suitable for operation at wavelengths from < 500 nm through 2 µm and beyond.