Integrated Optics
Planar waveguides on silicon chips for telecom and sensing applications
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Microfluidics
Biochips, Microreactors, Lab-on-a-Chip, Modular microfluidics for life sciences and chemistry
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Foundry Services
LPCVD, PECVD, evaporation and sputtering of thin films
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Markets
MEMS-MST for telecom, life sciences and industrial process control
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