Metal PVD

Applications

Very wide, e.g.:
- Resistors for heating
- Thermistors
- Electrodes for EC- and amperometric sensors
- Capacitive actuation / sensing
- Coils
- Thermopiles
- Mirrors
- Magnetic sensors
etc.

Capabilities

- Cr, Au, Ni, Al, Pt, Pd, Ti, Ta, Cu, CuNi, NiFe, W, ...
- Thickness typically up to 1000 nm (depending on stress and adhesion)
- Sputtering and evaporation
- Bilayers / multilayers
- Annealing (recrystallisation, stress reduction & diffusion of alloys)
- Passivation