PECVD Silicon oxynitride (SiO_xN_y)

Applications

- Planar waveguides for gratings, filters, splitters etc.
- Passivation layer
- Sacrificial layer

Capabilities

- Refractive index tuning
- Patterning of waveguides
- Stress control

Properties
(indication)

Refractive Index

Tunable 1.45 ... 2.02

Reproducibility of RI

6 x 10^-4

Uniformity of RI

2-6 x 10^-4

Optical loss (632.8 nm)

< 0.2 dB/cm

Stress

Tunable 0 ... 300 MPa

Max thickness

> 5000 nm

Thickness uniformity

1%

Thickness reproducibility

3%