Value Proposition

LioniX MEMS and microtechnology services are particularly useful for companies developing MST/MEMS-based products, but who fail the access to critical technologies for small volume manufacturing or prototyping. LioniX experiences a particular influx from applications which are developed by telecom startups, life science, Industrial Process Control (IPC) equipment manufacturers and research institutes. Our processes are performed on silicon, SOI, borosilicate, fused silica and other substrates, preferably on 100 mm wafers but other sizes are possible as well. We work with carefully selected wafer manufacturers who deliver on request single/double side polished, different doping levels, roughness, bow/warp. You can also ship your own wafers, blank or processed.

Solutions

Based on the foundry processes of LioniX a variety of applications is realized. The majority of these applications cannot be disclosed due to confidentiality, but a small overview is given below:

Examples of membranes

• Sensors that use the thermal profile of a heated membrane to sense a small mass flow. These membranes are equipped with metallic thermocouples
• Massive arrays of membranes are equipped with capacitive electrodes to allow acoustic sensing and actuation to allow sensing with unprecedented resolution
• Ultra-thin 8nm (World Record) TEM grids

Examples of devices withthrough wafer holes

• Ion mobility spectrometer
• Micro and nano sieves allow for high throughput micro and nano particle generation

Examples of complex MEMS structures

• Different types of Scanning Probe Microscopy (SPM) tips require complex MEMS processing. Lionix develops tips with channels that allow precise application of droplets as well as tips with multiple probes that allow resistivity mapping with ultra high resolution
• Chemical sensors : ISFET CHEMFET Clark electrodes
• Functional membranes of Wool, Poly Propylene, celluloses, Anapore, PVDF