|
|
||
Optical Waveguide Structures
Involvement of LioniXLioniX acts as a supplier of SiON technology with an index contrast value of ~6%. Important parameters are refractive index control, ridge dimensions, channel attenuation and channel birefringence. With this relatively large index contrast value very small devices as coupled ring resonators can be defined, which can be thermally tuned. LioniX used its preferred PECVD SiON equipment for fabrication of these waveguides. Technical keywordsSiON Technology Contact CoreCom References:A. Melloni, R. Costa, P. Monguzzi and M. Martinelli, "Ring-resonator filters in silicon oxynitride technology for dense wavelength-division multiplexing systems", Optics Letters, Vol. 28, No. 17, 1567-1569, September 1, 2003. A. Melloni, G. Cusmai and M. Martinelli, "Experimental confirmation of Matched Bends", accepted by Optics Letters in November 2003. A. Melloni, R. Costa, P. Monguzzi, F. Morichetti, G. Cusmai and M. Martinelli, "Experimental investigation on ring resonator based filters in SiON technology ", 11th ECIO 2003. A. Melloni, P. Monguzzi and M. Martinelli, "Analysis of the Resonant Wavelength Router", 11th ECIO 2003. |
||